Active Anti-Vibration Unit using air pressure.
Most recommendable for the users who want to lower the device height.
The one of the world highest level thickness!
Acceleration sensors are mounted on this type, and pick up correctly small vibrations.
This type VAAV calculates with high speed algorithm of original anti-vibration and cancels vibration in an instant by price large output actuators.
A high acceleration sensitive sensor is attached on the floor side, and a world highest level of anti-vibration performance is achieved by feed forward control.
A precise high performance anti-vibration without resonance is maintained, and the vibration caused by the stage on the board can be attenuated.
- The height of this equipment is low, having the same performance with VAAV-A series.
- Displacement and position controls in all directions can be obtained by air pressure controls.
- Large capacity valves can be selected for the high speed response of a large load.
- They are designed to get safety certification CE mark. (controller SAC‒07-)
- Stage feed forward control software and vibration waveform display software are normally loaded.
- In the field of semiconductor production, these products are used for the steps of anti-vibration and inspections for minute processing and moving stages.
- In the liquid crystal production and inspection process, these products are conveniently used, because of their quick attenuation of the vibration caused by auto-loader or stage movements.
- In the field of precision mechanical processing, these products are used to remove vibration caused by big load movements during the process.
| Type | Load range | Dimension(mm) |
|---|---|---|
| VAAV-1000-110H | 500～1700kg | 240(W)×240(D)×110(H)mm |
| VAAV-2200-110H | 1100～3700kg | 350(W)×350(D)×110(H)mm |
| VAAV-4000-110H | 2100～7000kg | 420(W)×420(D)×110(H)mm |
| VAAV-7000-140H | 3600～12000kg | 450(W)×450(D)×140(H)mm |
- * Standard configuration is 4 units per stand.
- * The values mentioned in the load range of the above table is one when the load is static and equal.
| Controller SAC-07 |
300(W)×300(D)×118(H)mm |
|---|---|
| Power supply | AC100V～240V 100VA(Single phase) |
| Cable for power supply | 3m |
| Cable for unit connection | 5m |
| Regulator unit RGU-07 |
250(W)×100(D)×200(H)mm |
| No. of freedom | 3 axes 6 freedom |
|---|---|
| Vibration transmissibility |  |
| Position accuracy | ±10μm |
| Primary air pressure | More than 0.6 MPa (clean air) |
| Air consumption | Standard valve 60 L/min High speed valve 250 L/min |
